Materials
Little Things Factory produces fluidics components using anodically bondable borosilicate glass, alkaline-free glass, quartz glass and glass-Si combinations.*
Borosilicate glass
Type | Borofloat 33 ® |
Thickness range | 100 - 3000 µm |
Expansion coefficient (CTE) | 3.25 x 10-6 K-1 (adjusted to Si) |
Refraction index (nD) | 1.4713 |
Electrical properties |
Dielectric constant (25°C; 1 MHz): 4.6 Loss factor (25°C; 1 MHz): 37x10-4 |
Main characteristics |
Expansion coefficient adjusted to Si, anodically bondable |
Fused quartz
Thickness range | 300 - 2000 µm |
Expansion coefficient (CTE) | 0.5 x 10-6 K-1 |
Refraction index (nD) | 1.4586 |
Electrical properties |
Dielectric constant (20°C; 1 MHz): 3.75 Loss factor (20°C; 1 MHz): 4x10-4 |
Main characteristics |
High temperature stability through low ratio of hydroxide groups (OH) UV-permeable from approx. 270 nm |
Fused silica
Thickness range | 300 - 2000 µm |
Expansion coefficient (CTE) | 0.5 x 10-6 K-1 |
Refraction index (nD) | 1.4584 |
Electrical properties |
Dielectric constant (20°C; 1 MHz): 3.8 Loss factor (25°C; 1 MHz): 4x10-4 |
Main characteristics | UV-permeable from approx. 200 nm |
Silicon
For the manufacture of fluidics components Little Things Factory uses all monocrystalline standard silicon wafers available on the market; the specifications are selected to comply with customer requirements.
Typically, p-Bor doped <100> wafers are used for fluidics components
Additional materials
Little Things Factory produces fluidics components from all glass types available from well-known manufacturers in accordance with customer requirements.
* All technical data in accordance with the details supplied by the manufacturers of the raw materials - without liability - subject to modification.